JPS5152808Y2 - - Google Patents

Info

Publication number
JPS5152808Y2
JPS5152808Y2 JP4960472U JP4960472U JPS5152808Y2 JP S5152808 Y2 JPS5152808 Y2 JP S5152808Y2 JP 4960472 U JP4960472 U JP 4960472U JP 4960472 U JP4960472 U JP 4960472U JP S5152808 Y2 JPS5152808 Y2 JP S5152808Y2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP4960472U
Other languages
Japanese (ja)
Other versions
JPS4912704U (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP4960472U priority Critical patent/JPS5152808Y2/ja
Publication of JPS4912704U publication Critical patent/JPS4912704U/ja
Application granted granted Critical
Publication of JPS5152808Y2 publication Critical patent/JPS5152808Y2/ja
Expired legal-status Critical Current

Links

JP4960472U 1972-04-28 1972-04-28 Expired JPS5152808Y2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4960472U JPS5152808Y2 (en) 1972-04-28 1972-04-28

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4960472U JPS5152808Y2 (en) 1972-04-28 1972-04-28

Publications (2)

Publication Number Publication Date
JPS4912704U JPS4912704U (en) 1974-02-02
JPS5152808Y2 true JPS5152808Y2 (en) 1976-12-17

Family

ID=27928777

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4960472U Expired JPS5152808Y2 (en) 1972-04-28 1972-04-28

Country Status (1)

Country Link
JP (1) JPS5152808Y2 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US10742092B2 (en) 2013-11-13 2020-08-11 Brooks Automation, Inc. Position feedback for sealed environments

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02100136U (en) * 1989-01-30 1990-08-09

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US10742092B2 (en) 2013-11-13 2020-08-11 Brooks Automation, Inc. Position feedback for sealed environments
US11404939B2 (en) 2013-11-13 2022-08-02 Brooks Automation, US LLC Position feedback for sealed environments

Also Published As

Publication number Publication date
JPS4912704U (en) 1974-02-02

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