JPS5152808Y2 - - Google Patents
Info
- Publication number
- JPS5152808Y2 JPS5152808Y2 JP4960472U JP4960472U JPS5152808Y2 JP S5152808 Y2 JPS5152808 Y2 JP S5152808Y2 JP 4960472 U JP4960472 U JP 4960472U JP 4960472 U JP4960472 U JP 4960472U JP S5152808 Y2 JPS5152808 Y2 JP S5152808Y2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Operation Control Of Excavators (AREA)
- Component Parts Of Construction Machinery (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP4960472U JPS5152808Y2 (de) | 1972-04-28 | 1972-04-28 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP4960472U JPS5152808Y2 (de) | 1972-04-28 | 1972-04-28 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS4912704U JPS4912704U (de) | 1974-02-02 |
JPS5152808Y2 true JPS5152808Y2 (de) | 1976-12-17 |
Family
ID=27928777
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP4960472U Expired JPS5152808Y2 (de) | 1972-04-28 | 1972-04-28 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5152808Y2 (de) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US10742092B2 (en) | 2013-11-13 | 2020-08-11 | Brooks Automation, Inc. | Position feedback for sealed environments |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH02100136U (de) * | 1989-01-30 | 1990-08-09 |
-
1972
- 1972-04-28 JP JP4960472U patent/JPS5152808Y2/ja not_active Expired
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US10742092B2 (en) | 2013-11-13 | 2020-08-11 | Brooks Automation, Inc. | Position feedback for sealed environments |
US11404939B2 (en) | 2013-11-13 | 2022-08-02 | Brooks Automation, US LLC | Position feedback for sealed environments |
Also Published As
Publication number | Publication date |
---|---|
JPS4912704U (de) | 1974-02-02 |