JPS5151990A - - Google Patents
Info
- Publication number
- JPS5151990A JPS5151990A JP49125559A JP12555974A JPS5151990A JP S5151990 A JPS5151990 A JP S5151990A JP 49125559 A JP49125559 A JP 49125559A JP 12555974 A JP12555974 A JP 12555974A JP S5151990 A JPS5151990 A JP S5151990A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Analysing Materials By The Use Of Radiation (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP49125559A JPS5151990A (ja) | 1974-11-01 | 1974-11-01 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP49125559A JPS5151990A (ja) | 1974-11-01 | 1974-11-01 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS5151990A true JPS5151990A (ja) | 1976-05-07 |
Family
ID=14913184
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP49125559A Pending JPS5151990A (ja) | 1974-11-01 | 1974-11-01 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5151990A (ja) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2013211280A (ja) * | 2007-08-08 | 2013-10-10 | Hitachi High-Tech Science Corp | 複合集束イオンビーム装置及びそれを用いた加工観察方法、加工方法 |
-
1974
- 1974-11-01 JP JP49125559A patent/JPS5151990A/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2013211280A (ja) * | 2007-08-08 | 2013-10-10 | Hitachi High-Tech Science Corp | 複合集束イオンビーム装置及びそれを用いた加工観察方法、加工方法 |