JPS5150659A - - Google Patents

Info

Publication number
JPS5150659A
JPS5150659A JP49124367A JP12436774A JPS5150659A JP S5150659 A JPS5150659 A JP S5150659A JP 49124367 A JP49124367 A JP 49124367A JP 12436774 A JP12436774 A JP 12436774A JP S5150659 A JPS5150659 A JP S5150659A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP49124367A
Other languages
Japanese (ja)
Inventor
Yutaka Takeda
Motonao Hirao
Masahiko Kogirima
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP49124367A priority Critical patent/JPS5150659A/ja
Publication of JPS5150659A publication Critical patent/JPS5150659A/ja
Pending legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
JP49124367A 1974-10-30 1974-10-30 Pending JPS5150659A (enExample)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP49124367A JPS5150659A (enExample) 1974-10-30 1974-10-30

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP49124367A JPS5150659A (enExample) 1974-10-30 1974-10-30

Publications (1)

Publication Number Publication Date
JPS5150659A true JPS5150659A (enExample) 1976-05-04

Family

ID=14883636

Family Applications (1)

Application Number Title Priority Date Filing Date
JP49124367A Pending JPS5150659A (enExample) 1974-10-30 1974-10-30

Country Status (1)

Country Link
JP (1) JPS5150659A (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55137381U (enExample) * 1979-03-22 1980-09-30

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55137381U (enExample) * 1979-03-22 1980-09-30

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