JPS5150235A - SHINKUJOCHAKUHO - Google Patents

SHINKUJOCHAKUHO

Info

Publication number
JPS5150235A
JPS5150235A JP12465374A JP12465374A JPS5150235A JP S5150235 A JPS5150235 A JP S5150235A JP 12465374 A JP12465374 A JP 12465374A JP 12465374 A JP12465374 A JP 12465374A JP S5150235 A JPS5150235 A JP S5150235A
Authority
JP
Japan
Prior art keywords
shinkujochakuho
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP12465374A
Other languages
Japanese (ja)
Inventor
Kazuya Sugyama
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Individual
Original Assignee
Individual
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Individual filed Critical Individual
Priority to JP12465374A priority Critical patent/JPS5150235A/en
Publication of JPS5150235A publication Critical patent/JPS5150235A/en
Pending legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP12465374A 1974-10-29 1974-10-29 SHINKUJOCHAKUHO Pending JPS5150235A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12465374A JPS5150235A (en) 1974-10-29 1974-10-29 SHINKUJOCHAKUHO

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12465374A JPS5150235A (en) 1974-10-29 1974-10-29 SHINKUJOCHAKUHO

Publications (1)

Publication Number Publication Date
JPS5150235A true JPS5150235A (en) 1976-05-01

Family

ID=14890719

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12465374A Pending JPS5150235A (en) 1974-10-29 1974-10-29 SHINKUJOCHAKUHO

Country Status (1)

Country Link
JP (1) JPS5150235A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01119663A (en) * 1987-11-02 1989-05-11 Mitsubishi Electric Corp Thin film-forming apparatus

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01119663A (en) * 1987-11-02 1989-05-11 Mitsubishi Electric Corp Thin film-forming apparatus

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