JPS5148965U - - Google Patents

Info

Publication number
JPS5148965U
JPS5148965U JP1974106473U JP10647374U JPS5148965U JP S5148965 U JPS5148965 U JP S5148965U JP 1974106473 U JP1974106473 U JP 1974106473U JP 10647374 U JP10647374 U JP 10647374U JP S5148965 U JPS5148965 U JP S5148965U
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1974106473U
Other languages
Japanese (ja)
Other versions
JPS5512429Y2 (ja�@�@
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1974106473U priority Critical patent/JPS5512429Y2/ja
Publication of JPS5148965U publication Critical patent/JPS5148965U/ja
Application granted granted Critical
Publication of JPS5512429Y2 publication Critical patent/JPS5512429Y2/ja
Expired legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C1/00—Manufacture or treatment of devices or systems in or on a substrate
    • B81C1/00015—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems
    • B81C1/00261—Processes for packaging MEMS devices
    • B81C1/00269—Bonding of solid lids or wafers to the substrate

Landscapes

  • Lead Frames For Integrated Circuits (AREA)
JP1974106473U 1974-09-03 1974-09-03 Expired JPS5512429Y2 (ja�@�@)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1974106473U JPS5512429Y2 (ja�@�@) 1974-09-03 1974-09-03

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1974106473U JPS5512429Y2 (ja�@�@) 1974-09-03 1974-09-03

Publications (2)

Publication Number Publication Date
JPS5148965U true JPS5148965U (ja�@�@) 1976-04-13
JPS5512429Y2 JPS5512429Y2 (ja�@�@) 1980-03-18

Family

ID=28322534

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1974106473U Expired JPS5512429Y2 (ja�@�@) 1974-09-03 1974-09-03

Country Status (1)

Country Link
JP (1) JPS5512429Y2 (ja�@�@)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4922786A (ja�@�@) * 1972-05-10 1974-02-28

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4922786A (ja�@�@) * 1972-05-10 1974-02-28

Also Published As

Publication number Publication date
JPS5512429Y2 (ja�@�@) 1980-03-18

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