JPS5148965U - - Google Patents
Info
- Publication number
- JPS5148965U JPS5148965U JP1974106473U JP10647374U JPS5148965U JP S5148965 U JPS5148965 U JP S5148965U JP 1974106473 U JP1974106473 U JP 1974106473U JP 10647374 U JP10647374 U JP 10647374U JP S5148965 U JPS5148965 U JP S5148965U
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
- B81C1/00—Manufacture or treatment of devices or systems in or on a substrate
- B81C1/00015—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems
- B81C1/00261—Processes for packaging MEMS devices
- B81C1/00269—Bonding of solid lids or wafers to the substrate
Landscapes
- Lead Frames For Integrated Circuits (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1974106473U JPS5512429Y2 (https=) | 1974-09-03 | 1974-09-03 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1974106473U JPS5512429Y2 (https=) | 1974-09-03 | 1974-09-03 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5148965U true JPS5148965U (https=) | 1976-04-13 |
| JPS5512429Y2 JPS5512429Y2 (https=) | 1980-03-18 |
Family
ID=28322534
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1974106473U Expired JPS5512429Y2 (https=) | 1974-09-03 | 1974-09-03 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5512429Y2 (https=) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4922786A (https=) * | 1972-05-10 | 1974-02-28 |
-
1974
- 1974-09-03 JP JP1974106473U patent/JPS5512429Y2/ja not_active Expired
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4922786A (https=) * | 1972-05-10 | 1974-02-28 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5512429Y2 (https=) | 1980-03-18 |