JPS5148874B2 - - Google Patents

Info

Publication number
JPS5148874B2
JPS5148874B2 JP3645272A JP3645272A JPS5148874B2 JP S5148874 B2 JPS5148874 B2 JP S5148874B2 JP 3645272 A JP3645272 A JP 3645272A JP 3645272 A JP3645272 A JP 3645272A JP S5148874 B2 JPS5148874 B2 JP S5148874B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP3645272A
Other languages
Japanese (ja)
Other versions
JPS48103042A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP3645272A priority Critical patent/JPS5148874B2/ja
Publication of JPS48103042A publication Critical patent/JPS48103042A/ja
Publication of JPS5148874B2 publication Critical patent/JPS5148874B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Preparing Plates And Mask In Photomechanical Process (AREA)
  • ing And Chemical Polishing (AREA)
JP3645272A 1972-04-13 1972-04-13 Expired JPS5148874B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3645272A JPS5148874B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1972-04-13 1972-04-13

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3645272A JPS5148874B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1972-04-13 1972-04-13

Publications (2)

Publication Number Publication Date
JPS48103042A JPS48103042A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1973-12-24
JPS5148874B2 true JPS5148874B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1976-12-23

Family

ID=12470194

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3645272A Expired JPS5148874B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1972-04-13 1972-04-13

Country Status (1)

Country Link
JP (1) JPS5148874B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6218057U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1985-07-17 1987-02-03

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6218057U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1985-07-17 1987-02-03

Also Published As

Publication number Publication date
JPS48103042A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1973-12-24

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