JPS5148750B2 - - Google Patents
Info
- Publication number
- JPS5148750B2 JPS5148750B2 JP6527371A JP6527371A JPS5148750B2 JP S5148750 B2 JPS5148750 B2 JP S5148750B2 JP 6527371 A JP6527371 A JP 6527371A JP 6527371 A JP6527371 A JP 6527371A JP S5148750 B2 JPS5148750 B2 JP S5148750B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Read Only Memory (AREA)
- Non-Volatile Memory (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6527371A JPS5148750B2 (en:Method) | 1971-08-26 | 1971-08-26 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6527371A JPS5148750B2 (en:Method) | 1971-08-26 | 1971-08-26 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS4831029A JPS4831029A (en:Method) | 1973-04-24 |
| JPS5148750B2 true JPS5148750B2 (en:Method) | 1976-12-22 |
Family
ID=13282138
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6527371A Expired JPS5148750B2 (en:Method) | 1971-08-26 | 1971-08-26 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5148750B2 (en:Method) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4543271A (en) * | 1984-07-02 | 1985-09-24 | Hughes Aircraft Company | Silicon oxynitride material and photochemical process for forming same |
| JPH0793298B2 (ja) * | 1988-10-11 | 1995-10-09 | 日本電気株式会社 | 半導体装置の形成方法 |
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1971
- 1971-08-26 JP JP6527371A patent/JPS5148750B2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS4831029A (en:Method) | 1973-04-24 |