JPS5148750B2 - - Google Patents

Info

Publication number
JPS5148750B2
JPS5148750B2 JP6527371A JP6527371A JPS5148750B2 JP S5148750 B2 JPS5148750 B2 JP S5148750B2 JP 6527371 A JP6527371 A JP 6527371A JP 6527371 A JP6527371 A JP 6527371A JP S5148750 B2 JPS5148750 B2 JP S5148750B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP6527371A
Other languages
Japanese (ja)
Other versions
JPS4831029A (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP6527371A priority Critical patent/JPS5148750B2/ja
Publication of JPS4831029A publication Critical patent/JPS4831029A/ja
Publication of JPS5148750B2 publication Critical patent/JPS5148750B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Read Only Memory (AREA)
  • Non-Volatile Memory (AREA)
JP6527371A 1971-08-26 1971-08-26 Expired JPS5148750B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6527371A JPS5148750B2 (en) 1971-08-26 1971-08-26

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6527371A JPS5148750B2 (en) 1971-08-26 1971-08-26

Publications (2)

Publication Number Publication Date
JPS4831029A JPS4831029A (en) 1973-04-24
JPS5148750B2 true JPS5148750B2 (en) 1976-12-22

Family

ID=13282138

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6527371A Expired JPS5148750B2 (en) 1971-08-26 1971-08-26

Country Status (1)

Country Link
JP (1) JPS5148750B2 (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4543271A (en) * 1984-07-02 1985-09-24 Hughes Aircraft Company Silicon oxynitride material and photochemical process for forming same
JPH0793298B2 (en) * 1988-10-11 1995-10-09 日本電気株式会社 Method for forming semiconductor device

Also Published As

Publication number Publication date
JPS4831029A (en) 1973-04-24

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