JPS5147563B2 - - Google Patents
Info
- Publication number
- JPS5147563B2 JPS5147563B2 JP12995072A JP12995072A JPS5147563B2 JP S5147563 B2 JPS5147563 B2 JP S5147563B2 JP 12995072 A JP12995072 A JP 12995072A JP 12995072 A JP12995072 A JP 12995072A JP S5147563 B2 JPS5147563 B2 JP S5147563B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12995072A JPS5147563B2 (en) | 1972-12-27 | 1972-12-27 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12995072A JPS5147563B2 (en) | 1972-12-27 | 1972-12-27 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS4990075A JPS4990075A (en) | 1974-08-28 |
| JPS5147563B2 true JPS5147563B2 (en) | 1976-12-15 |
Family
ID=15022433
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12995072A Expired JPS5147563B2 (en) | 1972-12-27 | 1972-12-27 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5147563B2 (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2015064279A (en) * | 2013-09-25 | 2015-04-09 | 株式会社荏原製作所 | Inspection device and method for generating image data for inspection |
| US10074510B2 (en) | 2013-08-09 | 2018-09-11 | Ebara Corporation | Inspection system and inspection image data generation method |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP6309194B2 (en) * | 2013-02-01 | 2018-04-11 | 株式会社ホロン | Noise reduction electron beam apparatus and electron beam noise reduction method |
-
1972
- 1972-12-27 JP JP12995072A patent/JPS5147563B2/ja not_active Expired
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US10074510B2 (en) | 2013-08-09 | 2018-09-11 | Ebara Corporation | Inspection system and inspection image data generation method |
| JP2015064279A (en) * | 2013-09-25 | 2015-04-09 | 株式会社荏原製作所 | Inspection device and method for generating image data for inspection |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS4990075A (en) | 1974-08-28 |