JPS5147344B2 - - Google Patents
Info
- Publication number
- JPS5147344B2 JPS5147344B2 JP46088267A JP8826771A JPS5147344B2 JP S5147344 B2 JPS5147344 B2 JP S5147344B2 JP 46088267 A JP46088267 A JP 46088267A JP 8826771 A JP8826771 A JP 8826771A JP S5147344 B2 JPS5147344 B2 JP S5147344B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Instruments For Measurement Of Length By Optical Means (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP46088267A JPS5147344B2 (OSRAM) | 1971-11-08 | 1971-11-08 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP46088267A JPS5147344B2 (OSRAM) | 1971-11-08 | 1971-11-08 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS4854950A JPS4854950A (OSRAM) | 1973-08-02 |
| JPS5147344B2 true JPS5147344B2 (OSRAM) | 1976-12-14 |
Family
ID=13938100
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP46088267A Expired JPS5147344B2 (OSRAM) | 1971-11-08 | 1971-11-08 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5147344B2 (OSRAM) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5542525U (OSRAM) * | 1978-09-12 | 1980-03-19 |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS58225301A (ja) * | 1982-06-24 | 1983-12-27 | Yokogawa Hokushin Electric Corp | 光学式変位測定装置 |
| JPH02298804A (ja) * | 1989-05-12 | 1990-12-11 | Canon Inc | 干渉計測装置 |
-
1971
- 1971-11-08 JP JP46088267A patent/JPS5147344B2/ja not_active Expired
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5542525U (OSRAM) * | 1978-09-12 | 1980-03-19 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS4854950A (OSRAM) | 1973-08-02 |