JPS5147332B2 - - Google Patents

Info

Publication number
JPS5147332B2
JPS5147332B2 JP6336971A JP6336971A JPS5147332B2 JP S5147332 B2 JPS5147332 B2 JP S5147332B2 JP 6336971 A JP6336971 A JP 6336971A JP 6336971 A JP6336971 A JP 6336971A JP S5147332 B2 JPS5147332 B2 JP S5147332B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP6336971A
Other languages
Japanese (ja)
Other versions
JPS4830506A (pl
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP6336971A priority Critical patent/JPS5147332B2/ja
Publication of JPS4830506A publication Critical patent/JPS4830506A/ja
Publication of JPS5147332B2 publication Critical patent/JPS5147332B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Projection-Type Copiers In General (AREA)
  • Preparing Plates And Mask In Photomechanical Process (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
JP6336971A 1971-08-21 1971-08-21 Expired JPS5147332B2 (pl)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6336971A JPS5147332B2 (pl) 1971-08-21 1971-08-21

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6336971A JPS5147332B2 (pl) 1971-08-21 1971-08-21

Publications (2)

Publication Number Publication Date
JPS4830506A JPS4830506A (pl) 1973-04-21
JPS5147332B2 true JPS5147332B2 (pl) 1976-12-14

Family

ID=13227281

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6336971A Expired JPS5147332B2 (pl) 1971-08-21 1971-08-21

Country Status (1)

Country Link
JP (1) JPS5147332B2 (pl)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5321032U (pl) * 1976-07-29 1978-02-22
JPS5631073U (pl) * 1979-08-16 1981-03-26
JPS6213675U (pl) * 1985-07-09 1987-01-27

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5321032U (pl) * 1976-07-29 1978-02-22
JPS5631073U (pl) * 1979-08-16 1981-03-26
JPS6213675U (pl) * 1985-07-09 1987-01-27

Also Published As

Publication number Publication date
JPS4830506A (pl) 1973-04-21

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