JPS5147332B2 - - Google Patents

Info

Publication number
JPS5147332B2
JPS5147332B2 JP6336971A JP6336971A JPS5147332B2 JP S5147332 B2 JPS5147332 B2 JP S5147332B2 JP 6336971 A JP6336971 A JP 6336971A JP 6336971 A JP6336971 A JP 6336971A JP S5147332 B2 JPS5147332 B2 JP S5147332B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP6336971A
Other languages
Japanese (ja)
Other versions
JPS4830506A (https=
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP6336971A priority Critical patent/JPS5147332B2/ja
Publication of JPS4830506A publication Critical patent/JPS4830506A/ja
Publication of JPS5147332B2 publication Critical patent/JPS5147332B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Projection-Type Copiers In General (AREA)
  • Preparing Plates And Mask In Photomechanical Process (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
JP6336971A 1971-08-21 1971-08-21 Expired JPS5147332B2 (https=)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6336971A JPS5147332B2 (https=) 1971-08-21 1971-08-21

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6336971A JPS5147332B2 (https=) 1971-08-21 1971-08-21

Publications (2)

Publication Number Publication Date
JPS4830506A JPS4830506A (https=) 1973-04-21
JPS5147332B2 true JPS5147332B2 (https=) 1976-12-14

Family

ID=13227281

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6336971A Expired JPS5147332B2 (https=) 1971-08-21 1971-08-21

Country Status (1)

Country Link
JP (1) JPS5147332B2 (https=)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5321032U (https=) * 1976-07-29 1978-02-22
JPS5631073U (https=) * 1979-08-16 1981-03-26
JPS6213675U (https=) * 1985-07-09 1987-01-27

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5321032U (https=) * 1976-07-29 1978-02-22
JPS5631073U (https=) * 1979-08-16 1981-03-26
JPS6213675U (https=) * 1985-07-09 1987-01-27

Also Published As

Publication number Publication date
JPS4830506A (https=) 1973-04-21

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