JPS5147332B2 - - Google Patents
Info
- Publication number
- JPS5147332B2 JPS5147332B2 JP6336971A JP6336971A JPS5147332B2 JP S5147332 B2 JPS5147332 B2 JP S5147332B2 JP 6336971 A JP6336971 A JP 6336971A JP 6336971 A JP6336971 A JP 6336971A JP S5147332 B2 JPS5147332 B2 JP S5147332B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Projection-Type Copiers In General (AREA)
- Preparing Plates And Mask In Photomechanical Process (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6336971A JPS5147332B2 (en:Method) | 1971-08-21 | 1971-08-21 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6336971A JPS5147332B2 (en:Method) | 1971-08-21 | 1971-08-21 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS4830506A JPS4830506A (en:Method) | 1973-04-21 |
| JPS5147332B2 true JPS5147332B2 (en:Method) | 1976-12-14 |
Family
ID=13227281
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6336971A Expired JPS5147332B2 (en:Method) | 1971-08-21 | 1971-08-21 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5147332B2 (en:Method) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5321032U (en:Method) * | 1976-07-29 | 1978-02-22 | ||
| JPS5631073U (en:Method) * | 1979-08-16 | 1981-03-26 | ||
| JPS6213675U (en:Method) * | 1985-07-09 | 1987-01-27 |
-
1971
- 1971-08-21 JP JP6336971A patent/JPS5147332B2/ja not_active Expired
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5321032U (en:Method) * | 1976-07-29 | 1978-02-22 | ||
| JPS5631073U (en:Method) * | 1979-08-16 | 1981-03-26 | ||
| JPS6213675U (en:Method) * | 1985-07-09 | 1987-01-27 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS4830506A (en:Method) | 1973-04-21 |