JPS5147153B2 - - Google Patents
Info
- Publication number
- JPS5147153B2 JPS5147153B2 JP10507272A JP10507272A JPS5147153B2 JP S5147153 B2 JPS5147153 B2 JP S5147153B2 JP 10507272 A JP10507272 A JP 10507272A JP 10507272 A JP10507272 A JP 10507272A JP S5147153 B2 JPS5147153 B2 JP S5147153B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10507272A JPS5147153B2 (en:Method) | 1972-10-20 | 1972-10-20 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10507272A JPS5147153B2 (en:Method) | 1972-10-20 | 1972-10-20 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS4963668A JPS4963668A (en:Method) | 1974-06-20 |
| JPS5147153B2 true JPS5147153B2 (en:Method) | 1976-12-13 |
Family
ID=14397728
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10507272A Expired JPS5147153B2 (en:Method) | 1972-10-20 | 1972-10-20 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5147153B2 (en:Method) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5619572U (en:Method) * | 1979-07-18 | 1981-02-20 | ||
| JPS60182728A (ja) * | 1984-02-29 | 1985-09-18 | Fujitsu Ltd | 縦型炉 |
-
1972
- 1972-10-20 JP JP10507272A patent/JPS5147153B2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS4963668A (en:Method) | 1974-06-20 |