JPS5147026B1 - - Google Patents
Info
- Publication number
- JPS5147026B1 JPS5147026B1 JP45015124A JP1512470A JPS5147026B1 JP S5147026 B1 JPS5147026 B1 JP S5147026B1 JP 45015124 A JP45015124 A JP 45015124A JP 1512470 A JP1512470 A JP 1512470A JP S5147026 B1 JPS5147026 B1 JP S5147026B1
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
- Holders For Sensitive Materials And Originals (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- ing And Chemical Polishing (AREA)
Priority Applications (5)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP45015124A JPS5147026B1 (enExample) | 1970-02-20 | 1970-02-20 | |
| DE19702009284 DE2009284C3 (de) | 1969-02-27 | 1970-02-27 | Fotomasken-Projektionseinrichtung |
| NL7002828A NL7002828A (enExample) | 1969-02-27 | 1970-02-27 | |
| GB957070A GB1305792A (enExample) | 1969-02-27 | 1970-02-27 | |
| US05/384,022 US3984186A (en) | 1969-02-27 | 1973-07-30 | Projection masking system |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP45015124A JPS5147026B1 (enExample) | 1970-02-20 | 1970-02-20 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS5147026B1 true JPS5147026B1 (enExample) | 1976-12-13 |
Family
ID=11880057
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP45015124A Pending JPS5147026B1 (enExample) | 1969-02-27 | 1970-02-20 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5147026B1 (enExample) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS557429U (enExample) * | 1978-06-27 | 1980-01-18 |
-
1970
- 1970-02-20 JP JP45015124A patent/JPS5147026B1/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS557429U (enExample) * | 1978-06-27 | 1980-01-18 |