JPS5146719B2 - - Google Patents
Info
- Publication number
- JPS5146719B2 JPS5146719B2 JP6535972A JP6535972A JPS5146719B2 JP S5146719 B2 JPS5146719 B2 JP S5146719B2 JP 6535972 A JP6535972 A JP 6535972A JP 6535972 A JP6535972 A JP 6535972A JP S5146719 B2 JPS5146719 B2 JP S5146719B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Physical Vapour Deposition (AREA)
- Length Measuring Devices By Optical Means (AREA)
Priority Applications (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6535972A JPS5146719B2 (https=) | 1972-06-29 | 1972-06-29 | |
| US372694A US3869211A (en) | 1972-06-29 | 1973-06-22 | Instrument for measuring thickness of thin film |
| DE2333326A DE2333326C3 (de) | 1972-06-29 | 1973-06-29 | Einrichtung zum Messen der Dicke eines auf einer Unterlage abgelagerten dünnen Films |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6535972A JPS5146719B2 (https=) | 1972-06-29 | 1972-06-29 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS4925951A JPS4925951A (https=) | 1974-03-07 |
| JPS5146719B2 true JPS5146719B2 (https=) | 1976-12-10 |
Family
ID=13284672
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6535972A Expired JPS5146719B2 (https=) | 1972-06-29 | 1972-06-29 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5146719B2 (https=) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS51145333A (en) * | 1975-06-09 | 1976-12-14 | Shuzo Hattori | Manufacturing method of multi-layer dielectric film reflector |
| JPS5852475A (ja) * | 1981-09-24 | 1983-03-28 | Ulvac Corp | 薄膜形成装置における薄膜監視測定方法およびその装置 |
| RS56037B1 (sr) * | 2004-06-24 | 2017-09-29 | Vertex Pharma | Modulatori atp-vezujućih kasetnih transportera |
| US8922790B2 (en) * | 2012-02-15 | 2014-12-30 | Shincron Co., Ltd. | Optical film thickness measuring device and thin film forming apparatus using the optical film thickness measuring device |
-
1972
- 1972-06-29 JP JP6535972A patent/JPS5146719B2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS4925951A (https=) | 1974-03-07 |