JPS5146719B2 - - Google Patents
Info
- Publication number
- JPS5146719B2 JPS5146719B2 JP6535972A JP6535972A JPS5146719B2 JP S5146719 B2 JPS5146719 B2 JP S5146719B2 JP 6535972 A JP6535972 A JP 6535972A JP 6535972 A JP6535972 A JP 6535972A JP S5146719 B2 JPS5146719 B2 JP S5146719B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP6535972A JPS5146719B2 (en) | 1972-06-29 | 1972-06-29 | |
US372694A US3869211A (en) | 1972-06-29 | 1973-06-22 | Instrument for measuring thickness of thin film |
DE2333326A DE2333326C3 (en) | 1972-06-29 | 1973-06-29 | Device for measuring the thickness of a thin film deposited on a support |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP6535972A JPS5146719B2 (en) | 1972-06-29 | 1972-06-29 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS4925951A JPS4925951A (en) | 1974-03-07 |
JPS5146719B2 true JPS5146719B2 (en) | 1976-12-10 |
Family
ID=13284672
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP6535972A Expired JPS5146719B2 (en) | 1972-06-29 | 1972-06-29 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5146719B2 (en) |
Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS51145333A (en) * | 1975-06-09 | 1976-12-14 | Shuzo Hattori | Manufacturing method of multi-layer dielectric film reflector |
JPS5852475A (en) * | 1981-09-24 | 1983-03-28 | Ulvac Corp | Method and device for monitoring and measuring thin film in thin film former |
LT2489659T (en) * | 2004-06-24 | 2018-03-26 | Vertex Pharmaceuticals Incorporated | Modulators of ATP-binding cassette transporters |
EP2816317A4 (en) * | 2012-02-15 | 2015-10-14 | Shincron Co Ltd | Optical film thickness measurement apparatus and thin-film forming apparatus using optical film thickness measurement apparatus |
-
1972
- 1972-06-29 JP JP6535972A patent/JPS5146719B2/ja not_active Expired
Also Published As
Publication number | Publication date |
---|---|
JPS4925951A (en) | 1974-03-07 |