JPS5146719B2 - - Google Patents

Info

Publication number
JPS5146719B2
JPS5146719B2 JP6535972A JP6535972A JPS5146719B2 JP S5146719 B2 JPS5146719 B2 JP S5146719B2 JP 6535972 A JP6535972 A JP 6535972A JP 6535972 A JP6535972 A JP 6535972A JP S5146719 B2 JPS5146719 B2 JP S5146719B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP6535972A
Other languages
Japanese (ja)
Other versions
JPS4925951A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP6535972A priority Critical patent/JPS5146719B2/ja
Priority to US372694A priority patent/US3869211A/en
Priority to DE2333326A priority patent/DE2333326C3/de
Publication of JPS4925951A publication Critical patent/JPS4925951A/ja
Publication of JPS5146719B2 publication Critical patent/JPS5146719B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Length Measuring Devices By Optical Means (AREA)
  • Physical Vapour Deposition (AREA)
JP6535972A 1972-06-29 1972-06-29 Expired JPS5146719B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP6535972A JPS5146719B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1972-06-29 1972-06-29
US372694A US3869211A (en) 1972-06-29 1973-06-22 Instrument for measuring thickness of thin film
DE2333326A DE2333326C3 (de) 1972-06-29 1973-06-29 Einrichtung zum Messen der Dicke eines auf einer Unterlage abgelagerten dünnen Films

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6535972A JPS5146719B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1972-06-29 1972-06-29

Publications (2)

Publication Number Publication Date
JPS4925951A JPS4925951A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1974-03-07
JPS5146719B2 true JPS5146719B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1976-12-10

Family

ID=13284672

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6535972A Expired JPS5146719B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1972-06-29 1972-06-29

Country Status (1)

Country Link
JP (1) JPS5146719B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS51145333A (en) * 1975-06-09 1976-12-14 Shuzo Hattori Manufacturing method of multi-layer dielectric film reflector
JPS5852475A (ja) * 1981-09-24 1983-03-28 Ulvac Corp 薄膜形成装置における薄膜監視測定方法およびその装置
CN101006076B (zh) * 2004-06-24 2010-09-29 沃泰克斯药物股份有限公司 Atp-结合弹夹转运蛋白的调控剂
US8922790B2 (en) * 2012-02-15 2014-12-30 Shincron Co., Ltd. Optical film thickness measuring device and thin film forming apparatus using the optical film thickness measuring device

Also Published As

Publication number Publication date
JPS4925951A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1974-03-07

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