JPS5146606B2 - - Google Patents

Info

Publication number
JPS5146606B2
JPS5146606B2 JP3988472A JP3988472A JPS5146606B2 JP S5146606 B2 JPS5146606 B2 JP S5146606B2 JP 3988472 A JP3988472 A JP 3988472A JP 3988472 A JP3988472 A JP 3988472A JP S5146606 B2 JPS5146606 B2 JP S5146606B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP3988472A
Other languages
Japanese (ja)
Other versions
JPS493624A (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP3988472A priority Critical patent/JPS5146606B2/ja
Publication of JPS493624A publication Critical patent/JPS493624A/ja
Publication of JPS5146606B2 publication Critical patent/JPS5146606B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Photosensitive Polymer And Photoresist Processing (AREA)
JP3988472A 1972-04-20 1972-04-20 Expired JPS5146606B2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3988472A JPS5146606B2 (enrdf_load_stackoverflow) 1972-04-20 1972-04-20

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3988472A JPS5146606B2 (enrdf_load_stackoverflow) 1972-04-20 1972-04-20

Publications (2)

Publication Number Publication Date
JPS493624A JPS493624A (enrdf_load_stackoverflow) 1974-01-12
JPS5146606B2 true JPS5146606B2 (enrdf_load_stackoverflow) 1976-12-10

Family

ID=12565390

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3988472A Expired JPS5146606B2 (enrdf_load_stackoverflow) 1972-04-20 1972-04-20

Country Status (1)

Country Link
JP (1) JPS5146606B2 (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI573828B (zh) * 2014-12-08 2017-03-11 信越化學工業股份有限公司 收縮材料及圖案形成方法

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4180604A (en) * 1977-12-30 1979-12-25 International Business Machines Corporation Two layer resist system

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI573828B (zh) * 2014-12-08 2017-03-11 信越化學工業股份有限公司 收縮材料及圖案形成方法

Also Published As

Publication number Publication date
JPS493624A (enrdf_load_stackoverflow) 1974-01-12

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