JPS5146606B2 - - Google Patents

Info

Publication number
JPS5146606B2
JPS5146606B2 JP3988472A JP3988472A JPS5146606B2 JP S5146606 B2 JPS5146606 B2 JP S5146606B2 JP 3988472 A JP3988472 A JP 3988472A JP 3988472 A JP3988472 A JP 3988472A JP S5146606 B2 JPS5146606 B2 JP S5146606B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP3988472A
Other languages
Japanese (ja)
Other versions
JPS493624A (cs
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP3988472A priority Critical patent/JPS5146606B2/ja
Publication of JPS493624A publication Critical patent/JPS493624A/ja
Publication of JPS5146606B2 publication Critical patent/JPS5146606B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Photosensitive Polymer And Photoresist Processing (AREA)
JP3988472A 1972-04-20 1972-04-20 Expired JPS5146606B2 (cs)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3988472A JPS5146606B2 (cs) 1972-04-20 1972-04-20

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3988472A JPS5146606B2 (cs) 1972-04-20 1972-04-20

Publications (2)

Publication Number Publication Date
JPS493624A JPS493624A (cs) 1974-01-12
JPS5146606B2 true JPS5146606B2 (cs) 1976-12-10

Family

ID=12565390

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3988472A Expired JPS5146606B2 (cs) 1972-04-20 1972-04-20

Country Status (1)

Country Link
JP (1) JPS5146606B2 (cs)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI573828B (zh) * 2014-12-08 2017-03-11 信越化學工業股份有限公司 收縮材料及圖案形成方法

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4180604A (en) * 1977-12-30 1979-12-25 International Business Machines Corporation Two layer resist system

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI573828B (zh) * 2014-12-08 2017-03-11 信越化學工業股份有限公司 收縮材料及圖案形成方法

Also Published As

Publication number Publication date
JPS493624A (cs) 1974-01-12

Similar Documents

Publication Publication Date Title
CS155031B1 (cs)
JPS4940185A (cs)
JPS4954572U (cs)
CS153934B1 (cs)
CS155091B1 (cs)
CS155798B1 (cs)
CS156320B1 (cs)
CH566523A5 (cs)
CH571084A5 (cs)
CH1285173A4 (cs)
CH559214A5 (cs)
CH559623A5 (cs)
CH559647A5 (cs)
CH561361A5 (cs)
CH561484A5 (cs)
CH561486A5 (cs)
CH561855A5 (cs)
CH561859A5 (cs)
CH561921A (cs)
CH562097A5 (cs)
CH562322A5 (cs)
CH563179A5 (cs)
CH563877A5 (cs)
CH564236A5 (cs)
BG21732A1 (cs)