JPS5146439Y2 - - Google Patents

Info

Publication number
JPS5146439Y2
JPS5146439Y2 JP11809672U JP11809672U JPS5146439Y2 JP S5146439 Y2 JPS5146439 Y2 JP S5146439Y2 JP 11809672 U JP11809672 U JP 11809672U JP 11809672 U JP11809672 U JP 11809672U JP S5146439 Y2 JPS5146439 Y2 JP S5146439Y2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP11809672U
Other languages
Japanese (ja)
Other versions
JPS4972742U (xx
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP11809672U priority Critical patent/JPS5146439Y2/ja
Publication of JPS4972742U publication Critical patent/JPS4972742U/ja
Application granted granted Critical
Publication of JPS5146439Y2 publication Critical patent/JPS5146439Y2/ja
Expired legal-status Critical Current

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Landscapes

  • Physical Vapour Deposition (AREA)
JP11809672U 1972-10-12 1972-10-12 Expired JPS5146439Y2 (xx)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11809672U JPS5146439Y2 (xx) 1972-10-12 1972-10-12

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11809672U JPS5146439Y2 (xx) 1972-10-12 1972-10-12

Publications (2)

Publication Number Publication Date
JPS4972742U JPS4972742U (xx) 1974-06-24
JPS5146439Y2 true JPS5146439Y2 (xx) 1976-11-10

Family

ID=28355155

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11809672U Expired JPS5146439Y2 (xx) 1972-10-12 1972-10-12

Country Status (1)

Country Link
JP (1) JPS5146439Y2 (xx)

Also Published As

Publication number Publication date
JPS4972742U (xx) 1974-06-24

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