JPS5146439Y2 - - Google Patents

Info

Publication number
JPS5146439Y2
JPS5146439Y2 JP11809672U JP11809672U JPS5146439Y2 JP S5146439 Y2 JPS5146439 Y2 JP S5146439Y2 JP 11809672 U JP11809672 U JP 11809672U JP 11809672 U JP11809672 U JP 11809672U JP S5146439 Y2 JPS5146439 Y2 JP S5146439Y2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP11809672U
Other languages
Japanese (ja)
Other versions
JPS4972742U (cg-RX-API-DMAC10.html
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP11809672U priority Critical patent/JPS5146439Y2/ja
Publication of JPS4972742U publication Critical patent/JPS4972742U/ja
Application granted granted Critical
Publication of JPS5146439Y2 publication Critical patent/JPS5146439Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP11809672U 1972-10-12 1972-10-12 Expired JPS5146439Y2 (cg-RX-API-DMAC10.html)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11809672U JPS5146439Y2 (cg-RX-API-DMAC10.html) 1972-10-12 1972-10-12

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11809672U JPS5146439Y2 (cg-RX-API-DMAC10.html) 1972-10-12 1972-10-12

Publications (2)

Publication Number Publication Date
JPS4972742U JPS4972742U (cg-RX-API-DMAC10.html) 1974-06-24
JPS5146439Y2 true JPS5146439Y2 (cg-RX-API-DMAC10.html) 1976-11-10

Family

ID=28355155

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11809672U Expired JPS5146439Y2 (cg-RX-API-DMAC10.html) 1972-10-12 1972-10-12

Country Status (1)

Country Link
JP (1) JPS5146439Y2 (cg-RX-API-DMAC10.html)

Also Published As

Publication number Publication date
JPS4972742U (cg-RX-API-DMAC10.html) 1974-06-24

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