JPS5146344B2 - - Google Patents

Info

Publication number
JPS5146344B2
JPS5146344B2 JP5958272A JP5958272A JPS5146344B2 JP S5146344 B2 JPS5146344 B2 JP S5146344B2 JP 5958272 A JP5958272 A JP 5958272A JP 5958272 A JP5958272 A JP 5958272A JP S5146344 B2 JPS5146344 B2 JP S5146344B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP5958272A
Other languages
Japanese (ja)
Other versions
JPS4923930A (
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP5958272A priority Critical patent/JPS5146344B2/ja
Publication of JPS4923930A publication Critical patent/JPS4923930A/ja
Publication of JPS5146344B2 publication Critical patent/JPS5146344B2/ja
Expired legal-status Critical Current

Links

JP5958272A 1972-07-03 1972-07-03 Expired JPS5146344B2 ( )

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5958272A JPS5146344B2 ( ) 1972-07-03 1972-07-03

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5958272A JPS5146344B2 ( ) 1972-07-03 1972-07-03

Publications (2)

Publication Number Publication Date
JPS4923930A JPS4923930A ( ) 1974-03-02
JPS5146344B2 true JPS5146344B2 ( ) 1976-12-08

Family

ID=13117350

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5958272A Expired JPS5146344B2 ( ) 1972-07-03 1972-07-03

Country Status (1)

Country Link
JP (1) JPS5146344B2 ( )

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5313454A (en) * 1976-07-23 1978-02-07 Chisso Corp Two point contactless optical displacement measuring apparatus
JPS5346853U ( ) * 1976-09-27 1978-04-20
JPS5382375A (en) * 1976-12-28 1978-07-20 Chisso Corp Nonncontact optical displacement measuring apparatus for two axes

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5313454A (en) * 1976-07-23 1978-02-07 Chisso Corp Two point contactless optical displacement measuring apparatus
JPS5346853U ( ) * 1976-09-27 1978-04-20
JPS5382375A (en) * 1976-12-28 1978-07-20 Chisso Corp Nonncontact optical displacement measuring apparatus for two axes

Also Published As

Publication number Publication date
JPS4923930A ( ) 1974-03-02

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