JPS5146344B2 - - Google Patents
Info
- Publication number
- JPS5146344B2 JPS5146344B2 JP5958272A JP5958272A JPS5146344B2 JP S5146344 B2 JPS5146344 B2 JP S5146344B2 JP 5958272 A JP5958272 A JP 5958272A JP 5958272 A JP5958272 A JP 5958272A JP S5146344 B2 JPS5146344 B2 JP S5146344B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP5958272A JPS5146344B2 ( ) | 1972-07-03 | 1972-07-03 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP5958272A JPS5146344B2 ( ) | 1972-07-03 | 1972-07-03 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS4923930A JPS4923930A ( ) | 1974-03-02 |
JPS5146344B2 true JPS5146344B2 ( ) | 1976-12-08 |
Family
ID=13117350
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP5958272A Expired JPS5146344B2 ( ) | 1972-07-03 | 1972-07-03 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5146344B2 ( ) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5313454A (en) * | 1976-07-23 | 1978-02-07 | Chisso Corp | Two point contactless optical displacement measuring apparatus |
JPS5346853U ( ) * | 1976-09-27 | 1978-04-20 | ||
JPS5382375A (en) * | 1976-12-28 | 1978-07-20 | Chisso Corp | Nonncontact optical displacement measuring apparatus for two axes |
-
1972
- 1972-07-03 JP JP5958272A patent/JPS5146344B2/ja not_active Expired
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5313454A (en) * | 1976-07-23 | 1978-02-07 | Chisso Corp | Two point contactless optical displacement measuring apparatus |
JPS5346853U ( ) * | 1976-09-27 | 1978-04-20 | ||
JPS5382375A (en) * | 1976-12-28 | 1978-07-20 | Chisso Corp | Nonncontact optical displacement measuring apparatus for two axes |
Also Published As
Publication number | Publication date |
---|---|
JPS4923930A ( ) | 1974-03-02 |