JPS5146062A - - Google Patents
Info
- Publication number
- JPS5146062A JPS5146062A JP49119240A JP11924074A JPS5146062A JP S5146062 A JPS5146062 A JP S5146062A JP 49119240 A JP49119240 A JP 49119240A JP 11924074 A JP11924074 A JP 11924074A JP S5146062 A JPS5146062 A JP S5146062A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP49119240A JPS5146062A (en) | 1974-10-18 | 1974-10-18 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP49119240A JPS5146062A (en) | 1974-10-18 | 1974-10-18 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS5146062A true JPS5146062A (en) | 1976-04-20 |
Family
ID=14756422
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP49119240A Pending JPS5146062A (en) | 1974-10-18 | 1974-10-18 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5146062A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPWO2021053704A1 (en) * | 2019-09-17 | 2021-03-25 |
-
1974
- 1974-10-18 JP JP49119240A patent/JPS5146062A/ja active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPWO2021053704A1 (en) * | 2019-09-17 | 2021-03-25 | ||
| WO2021053704A1 (en) * | 2019-09-17 | 2021-03-25 | 株式会社日立ハイテク | Ion beam device |