JPS5145980Y2 - - Google Patents

Info

Publication number
JPS5145980Y2
JPS5145980Y2 JP1972093689U JP9368972U JPS5145980Y2 JP S5145980 Y2 JPS5145980 Y2 JP S5145980Y2 JP 1972093689 U JP1972093689 U JP 1972093689U JP 9368972 U JP9368972 U JP 9368972U JP S5145980 Y2 JPS5145980 Y2 JP S5145980Y2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1972093689U
Other languages
Japanese (ja)
Other versions
JPS4951146U (enExample
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1972093689U priority Critical patent/JPS5145980Y2/ja
Publication of JPS4951146U publication Critical patent/JPS4951146U/ja
Application granted granted Critical
Publication of JPS5145980Y2 publication Critical patent/JPS5145980Y2/ja
Expired legal-status Critical Current

Links

JP1972093689U 1972-08-11 1972-08-11 Expired JPS5145980Y2 (enExample)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1972093689U JPS5145980Y2 (enExample) 1972-08-11 1972-08-11

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1972093689U JPS5145980Y2 (enExample) 1972-08-11 1972-08-11

Publications (2)

Publication Number Publication Date
JPS4951146U JPS4951146U (enExample) 1974-05-07
JPS5145980Y2 true JPS5145980Y2 (enExample) 1976-11-06

Family

ID=28286588

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1972093689U Expired JPS5145980Y2 (enExample) 1972-08-11 1972-08-11

Country Status (1)

Country Link
JP (1) JPS5145980Y2 (enExample)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5212559A (en) * 1975-07-21 1977-01-31 Hitachi Ltd Exposure of electronic microscope

Also Published As

Publication number Publication date
JPS4951146U (enExample) 1974-05-07

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