JPS5145980Y2 - - Google Patents

Info

Publication number
JPS5145980Y2
JPS5145980Y2 JP1972093689U JP9368972U JPS5145980Y2 JP S5145980 Y2 JPS5145980 Y2 JP S5145980Y2 JP 1972093689 U JP1972093689 U JP 1972093689U JP 9368972 U JP9368972 U JP 9368972U JP S5145980 Y2 JPS5145980 Y2 JP S5145980Y2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1972093689U
Other languages
Japanese (ja)
Other versions
JPS4951146U (cg-RX-API-DMAC10.html
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1972093689U priority Critical patent/JPS5145980Y2/ja
Publication of JPS4951146U publication Critical patent/JPS4951146U/ja
Application granted granted Critical
Publication of JPS5145980Y2 publication Critical patent/JPS5145980Y2/ja
Expired legal-status Critical Current

Links

JP1972093689U 1972-08-11 1972-08-11 Expired JPS5145980Y2 (cg-RX-API-DMAC10.html)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1972093689U JPS5145980Y2 (cg-RX-API-DMAC10.html) 1972-08-11 1972-08-11

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1972093689U JPS5145980Y2 (cg-RX-API-DMAC10.html) 1972-08-11 1972-08-11

Publications (2)

Publication Number Publication Date
JPS4951146U JPS4951146U (cg-RX-API-DMAC10.html) 1974-05-07
JPS5145980Y2 true JPS5145980Y2 (cg-RX-API-DMAC10.html) 1976-11-06

Family

ID=28286588

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1972093689U Expired JPS5145980Y2 (cg-RX-API-DMAC10.html) 1972-08-11 1972-08-11

Country Status (1)

Country Link
JP (1) JPS5145980Y2 (cg-RX-API-DMAC10.html)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5212559A (en) * 1975-07-21 1977-01-31 Hitachi Ltd Exposure of electronic microscope

Also Published As

Publication number Publication date
JPS4951146U (cg-RX-API-DMAC10.html) 1974-05-07

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