JPS5145682A - Shinkujochakusochi - Google Patents
ShinkujochakusochiInfo
- Publication number
- JPS5145682A JPS5145682A JP11918174A JP11918174A JPS5145682A JP S5145682 A JPS5145682 A JP S5145682A JP 11918174 A JP11918174 A JP 11918174A JP 11918174 A JP11918174 A JP 11918174A JP S5145682 A JPS5145682 A JP S5145682A
- Authority
- JP
- Japan
- Prior art keywords
- shinkujochakusochi
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP11918174A JPS5145682A (ja) | 1974-10-18 | 1974-10-18 | Shinkujochakusochi |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP11918174A JPS5145682A (ja) | 1974-10-18 | 1974-10-18 | Shinkujochakusochi |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5145682A true JPS5145682A (ja) | 1976-04-19 |
Family
ID=14754901
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP11918174A Pending JPS5145682A (ja) | 1974-10-18 | 1974-10-18 | Shinkujochakusochi |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5145682A (ja) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS59145564U (ja) * | 1983-03-18 | 1984-09-28 | 株式会社日立製作所 | スパツタリング装置 |
JPS60238476A (ja) * | 1985-04-30 | 1985-11-27 | Hitachi Ltd | 真空蒸着装置 |
JPS6311598U (ja) * | 1986-07-02 | 1988-01-26 |
-
1974
- 1974-10-18 JP JP11918174A patent/JPS5145682A/ja active Pending
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS59145564U (ja) * | 1983-03-18 | 1984-09-28 | 株式会社日立製作所 | スパツタリング装置 |
JPS60238476A (ja) * | 1985-04-30 | 1985-11-27 | Hitachi Ltd | 真空蒸着装置 |
JPS6311598U (ja) * | 1986-07-02 | 1988-01-26 |
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