JPS5145682A - Shinkujochakusochi - Google Patents

Shinkujochakusochi

Info

Publication number
JPS5145682A
JPS5145682A JP11918174A JP11918174A JPS5145682A JP S5145682 A JPS5145682 A JP S5145682A JP 11918174 A JP11918174 A JP 11918174A JP 11918174 A JP11918174 A JP 11918174A JP S5145682 A JPS5145682 A JP S5145682A
Authority
JP
Japan
Prior art keywords
shinkujochakusochi
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP11918174A
Other languages
English (en)
Inventor
Katsuhisa Yonehara
Hisashi Miura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP11918174A priority Critical patent/JPS5145682A/ja
Publication of JPS5145682A publication Critical patent/JPS5145682A/ja
Pending legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP11918174A 1974-10-18 1974-10-18 Shinkujochakusochi Pending JPS5145682A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11918174A JPS5145682A (ja) 1974-10-18 1974-10-18 Shinkujochakusochi

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11918174A JPS5145682A (ja) 1974-10-18 1974-10-18 Shinkujochakusochi

Publications (1)

Publication Number Publication Date
JPS5145682A true JPS5145682A (ja) 1976-04-19

Family

ID=14754901

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11918174A Pending JPS5145682A (ja) 1974-10-18 1974-10-18 Shinkujochakusochi

Country Status (1)

Country Link
JP (1) JPS5145682A (ja)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59145564U (ja) * 1983-03-18 1984-09-28 株式会社日立製作所 スパツタリング装置
JPS60238476A (ja) * 1985-04-30 1985-11-27 Hitachi Ltd 真空蒸着装置
JPS6311598U (ja) * 1986-07-02 1988-01-26

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59145564U (ja) * 1983-03-18 1984-09-28 株式会社日立製作所 スパツタリング装置
JPS60238476A (ja) * 1985-04-30 1985-11-27 Hitachi Ltd 真空蒸着装置
JPS6311598U (ja) * 1986-07-02 1988-01-26

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