JPS5145435A - Shatsutaano boshinbosuisochi - Google Patents
Shatsutaano boshinbosuisochiInfo
- Publication number
- JPS5145435A JPS5145435A JP11962074A JP11962074A JPS5145435A JP S5145435 A JPS5145435 A JP S5145435A JP 11962074 A JP11962074 A JP 11962074A JP 11962074 A JP11962074 A JP 11962074A JP S5145435 A JPS5145435 A JP S5145435A
- Authority
- JP
- Japan
- Prior art keywords
- shatsutaano
- boshinbosuisochi
- shatsutaano boshinbosuisochi
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP11962074A JPS5145435A (en) | 1974-10-16 | 1974-10-16 | Shatsutaano boshinbosuisochi |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP11962074A JPS5145435A (en) | 1974-10-16 | 1974-10-16 | Shatsutaano boshinbosuisochi |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5145435A true JPS5145435A (en) | 1976-04-17 |
JPS5326412B2 JPS5326412B2 (en) | 1978-08-02 |
Family
ID=14765930
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP11962074A Granted JPS5145435A (en) | 1974-10-16 | 1974-10-16 | Shatsutaano boshinbosuisochi |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5145435A (en) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5858147A (en) * | 1981-09-30 | 1983-04-06 | Shimadzu Corp | Plasma treating apparatus |
JPS59143328A (en) * | 1983-02-03 | 1984-08-16 | Anelva Corp | Dry etching device |
JPH02290243A (en) * | 1989-04-28 | 1990-11-30 | Tokyo Rika Univ | Flat processing method for hard film material |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS487187U (en) * | 1971-06-07 | 1973-01-26 |
-
1974
- 1974-10-16 JP JP11962074A patent/JPS5145435A/en active Granted
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS487187U (en) * | 1971-06-07 | 1973-01-26 |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5858147A (en) * | 1981-09-30 | 1983-04-06 | Shimadzu Corp | Plasma treating apparatus |
JPS59143328A (en) * | 1983-02-03 | 1984-08-16 | Anelva Corp | Dry etching device |
JPH02290243A (en) * | 1989-04-28 | 1990-11-30 | Tokyo Rika Univ | Flat processing method for hard film material |
Also Published As
Publication number | Publication date |
---|---|
JPS5326412B2 (en) | 1978-08-02 |
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