JPS5145337B2 - - Google Patents
Info
- Publication number
- JPS5145337B2 JPS5145337B2 JP3397771A JP3397771A JPS5145337B2 JP S5145337 B2 JPS5145337 B2 JP S5145337B2 JP 3397771 A JP3397771 A JP 3397771A JP 3397771 A JP3397771 A JP 3397771A JP S5145337 B2 JPS5145337 B2 JP S5145337B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3397771A JPS5145337B2 (en) | 1971-05-21 | 1971-05-21 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3397771A JPS5145337B2 (en) | 1971-05-21 | 1971-05-21 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS4844833A JPS4844833A (en) | 1973-06-27 |
| JPS5145337B2 true JPS5145337B2 (en) | 1976-12-03 |
Family
ID=12401533
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3397771A Expired JPS5145337B2 (en) | 1971-05-21 | 1971-05-21 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5145337B2 (en) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0639358B2 (en) * | 1984-11-27 | 1994-05-25 | ソニー株式会社 | Metalorganic vapor phase growth equipment |
| JPH02149769U (en) * | 1989-05-18 | 1990-12-21 |
-
1971
- 1971-05-21 JP JP3397771A patent/JPS5145337B2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS4844833A (en) | 1973-06-27 |