JPS5144744U - - Google Patents
Info
- Publication number
- JPS5144744U JPS5144744U JP11808874U JP11808874U JPS5144744U JP S5144744 U JPS5144744 U JP S5144744U JP 11808874 U JP11808874 U JP 11808874U JP 11808874 U JP11808874 U JP 11808874U JP S5144744 U JPS5144744 U JP S5144744U
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP11808874U JPS5144744U (en) | 1974-09-30 | 1974-09-30 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP11808874U JPS5144744U (en) | 1974-09-30 | 1974-09-30 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5144744U true JPS5144744U (en) | 1976-04-02 |
Family
ID=28355133
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP11808874U Pending JPS5144744U (en) | 1974-09-30 | 1974-09-30 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5144744U (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0328425U (en) * | 1989-07-28 | 1991-03-20 | ||
WO1999020374A1 (en) * | 1997-10-17 | 1999-04-29 | Ebara Corporation | Method and apparatus for processing exhaust gas of semiconductor fabrication |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4124462Y1 (en) * | 1964-08-28 | 1966-12-13 |
-
1974
- 1974-09-30 JP JP11808874U patent/JPS5144744U/ja active Pending
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4124462Y1 (en) * | 1964-08-28 | 1966-12-13 |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0328425U (en) * | 1989-07-28 | 1991-03-20 | ||
WO1999020374A1 (en) * | 1997-10-17 | 1999-04-29 | Ebara Corporation | Method and apparatus for processing exhaust gas of semiconductor fabrication |