JPS5144705B2 - - Google Patents

Info

Publication number
JPS5144705B2
JPS5144705B2 JP6777572A JP6777572A JPS5144705B2 JP S5144705 B2 JPS5144705 B2 JP S5144705B2 JP 6777572 A JP6777572 A JP 6777572A JP 6777572 A JP6777572 A JP 6777572A JP S5144705 B2 JPS5144705 B2 JP S5144705B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP6777572A
Other languages
Japanese (ja)
Other versions
JPS4927489A (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP6777572A priority Critical patent/JPS5144705B2/ja
Publication of JPS4927489A publication Critical patent/JPS4927489A/ja
Publication of JPS5144705B2 publication Critical patent/JPS5144705B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP6777572A 1972-07-06 1972-07-06 Expired JPS5144705B2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6777572A JPS5144705B2 (enrdf_load_stackoverflow) 1972-07-06 1972-07-06

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6777572A JPS5144705B2 (enrdf_load_stackoverflow) 1972-07-06 1972-07-06

Publications (2)

Publication Number Publication Date
JPS4927489A JPS4927489A (enrdf_load_stackoverflow) 1974-03-11
JPS5144705B2 true JPS5144705B2 (enrdf_load_stackoverflow) 1976-11-30

Family

ID=13354647

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6777572A Expired JPS5144705B2 (enrdf_load_stackoverflow) 1972-07-06 1972-07-06

Country Status (1)

Country Link
JP (1) JPS5144705B2 (enrdf_load_stackoverflow)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4989642A (enrdf_load_stackoverflow) * 1972-12-27 1974-08-27
JPS5127825A (ja) * 1974-09-02 1976-03-09 Ulvac Corp Himakukeiseisochi
JPS527820U (enrdf_load_stackoverflow) * 1975-07-02 1977-01-20

Also Published As

Publication number Publication date
JPS4927489A (enrdf_load_stackoverflow) 1974-03-11

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