JPS5144660B2 - - Google Patents

Info

Publication number
JPS5144660B2
JPS5144660B2 JP46081689A JP8168971A JPS5144660B2 JP S5144660 B2 JPS5144660 B2 JP S5144660B2 JP 46081689 A JP46081689 A JP 46081689A JP 8168971 A JP8168971 A JP 8168971A JP S5144660 B2 JPS5144660 B2 JP S5144660B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP46081689A
Other languages
Japanese (ja)
Other versions
JPS4847848A (enExample
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP46081689A priority Critical patent/JPS5144660B2/ja
Priority to US00298568A priority patent/US3782804A/en
Publication of JPS4847848A publication Critical patent/JPS4847848A/ja
Publication of JPS5144660B2 publication Critical patent/JPS5144660B2/ja
Expired legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03H—HOLOGRAPHIC PROCESSES OR APPARATUS
    • G03H1/00—Holographic processes or apparatus using light, infrared or ultraviolet waves for obtaining holograms or for obtaining an image from them; Details peculiar thereto
    • G03H1/32—Systems for obtaining speckle elimination

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Holo Graphy (AREA)
JP46081689A 1971-10-18 1971-10-18 Expired JPS5144660B2 (enExample)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP46081689A JPS5144660B2 (enExample) 1971-10-18 1971-10-18
US00298568A US3782804A (en) 1971-10-18 1972-10-18 Holography using multiple diffused object illumination beams

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP46081689A JPS5144660B2 (enExample) 1971-10-18 1971-10-18

Publications (2)

Publication Number Publication Date
JPS4847848A JPS4847848A (enExample) 1973-07-06
JPS5144660B2 true JPS5144660B2 (enExample) 1976-11-30

Family

ID=13753309

Family Applications (1)

Application Number Title Priority Date Filing Date
JP46081689A Expired JPS5144660B2 (enExample) 1971-10-18 1971-10-18

Country Status (2)

Country Link
US (1) US3782804A (enExample)
JP (1) JPS5144660B2 (enExample)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4130348A (en) * 1973-09-18 1978-12-19 Tokyo Shibaura Electric Co., Ltd. Optical system for a coherent light illuminating source
US4155630A (en) * 1977-11-17 1979-05-22 University Of Delaware Speckle elimination by random spatial phase modulation
JPS6477124A (en) * 1988-07-29 1989-03-23 Hitachi Ltd Projection type exposure device
GB2249192B (en) * 1990-07-18 1994-10-12 Sony Magnescale Inc Hologram scales
US6671035B2 (en) * 1999-09-29 2003-12-30 Asml Netherlands B.V. Illuminator for a lithography apparatus, a lithography apparatus comprising such an illuminator, and a manufacturing method employing such a lithography apparatus
TW546550B (en) * 1999-12-13 2003-08-11 Asml Netherlands Bv An illuminator for a lithography apparatus, a lithography apparatus comprising such an illuminator, and a manufacturing method employing such a lithography apparatus
JP4290900B2 (ja) * 2001-05-18 2009-07-08 日本ビクター株式会社 光源装置
US7202466B2 (en) * 2003-08-25 2007-04-10 Cadent Ltd. Apparatus and method for providing high intensity non-coherent light and for speckle reduction

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1218813A (en) * 1967-08-23 1971-01-13 Rca Corporatio Formerly Radio Speckle-free hologram recording apparatus
US3490827A (en) * 1967-10-19 1970-01-20 American Optical Corp Method and apparatus for speckle reduction in the reconstruction of holographic images
US3640599A (en) * 1969-04-04 1972-02-08 American Optical Corp Simulation of an extended incoherent object source in holography so as to eliminate speckle noise
US3659914A (en) * 1970-12-17 1972-05-02 Trw Inc Holographic system without laser speckle
US3677616A (en) * 1971-05-03 1972-07-18 Battelle Development Corp Reduced noise high resolution holographic imaging using spatially incoherent reconstructing radiation

Also Published As

Publication number Publication date
JPS4847848A (enExample) 1973-07-06
US3782804A (en) 1974-01-01

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