JPS5144594B1 - - Google Patents
Info
- Publication number
- JPS5144594B1 JPS5144594B1 JP9425970A JP9425970A JPS5144594B1 JP S5144594 B1 JPS5144594 B1 JP S5144594B1 JP 9425970 A JP9425970 A JP 9425970A JP 9425970 A JP9425970 A JP 9425970A JP S5144594 B1 JPS5144594 B1 JP S5144594B1
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9425970A JPS5144594B1 (en) | 1970-10-28 | 1970-10-28 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9425970A JPS5144594B1 (en) | 1970-10-28 | 1970-10-28 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS5144594B1 true JPS5144594B1 (en) | 1976-11-29 |
Family
ID=14105273
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9425970A Pending JPS5144594B1 (en) | 1970-10-28 | 1970-10-28 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5144594B1 (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS54138991U (en) * | 1978-03-16 | 1979-09-27 | ||
| US10622195B2 (en) | 2011-11-22 | 2020-04-14 | Lam Research Corporation | Multi zone gas injection upper electrode system |
-
1970
- 1970-10-28 JP JP9425970A patent/JPS5144594B1/ja active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS54138991U (en) * | 1978-03-16 | 1979-09-27 | ||
| US10622195B2 (en) | 2011-11-22 | 2020-04-14 | Lam Research Corporation | Multi zone gas injection upper electrode system |