JPS5143942B2 - - Google Patents
Info
- Publication number
- JPS5143942B2 JPS5143942B2 JP2165772A JP2165772A JPS5143942B2 JP S5143942 B2 JPS5143942 B2 JP S5143942B2 JP 2165772 A JP2165772 A JP 2165772A JP 2165772 A JP2165772 A JP 2165772A JP S5143942 B2 JPS5143942 B2 JP S5143942B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2165772A JPS5143942B2 (Direct) | 1972-03-02 | 1972-03-02 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2165772A JPS5143942B2 (Direct) | 1972-03-02 | 1972-03-02 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS4890474A JPS4890474A (Direct) | 1973-11-26 |
| JPS5143942B2 true JPS5143942B2 (Direct) | 1976-11-25 |
Family
ID=12061104
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2165772A Expired JPS5143942B2 (Direct) | 1972-03-02 | 1972-03-02 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5143942B2 (Direct) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6043819U (ja) * | 1983-09-05 | 1985-03-28 | 大阪瓦斯株式会社 | ラジアントチユ−ブバ−ナ |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS513778A (en) * | 1974-06-24 | 1976-01-13 | Owens Illinois Inc | Shirikono doopingushorisurutameno aruminiumumetahosufueetogen |
| CN101542687B (zh) * | 2006-11-29 | 2012-05-23 | 电气化学工业株式会社 | 硼扩散源的使用方法及半导体的制造方法 |
-
1972
- 1972-03-02 JP JP2165772A patent/JPS5143942B2/ja not_active Expired
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6043819U (ja) * | 1983-09-05 | 1985-03-28 | 大阪瓦斯株式会社 | ラジアントチユ−ブバ−ナ |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS4890474A (Direct) | 1973-11-26 |