JPS5143719Y2 - - Google Patents

Info

Publication number
JPS5143719Y2
JPS5143719Y2 JP10817772U JP10817772U JPS5143719Y2 JP S5143719 Y2 JPS5143719 Y2 JP S5143719Y2 JP 10817772 U JP10817772 U JP 10817772U JP 10817772 U JP10817772 U JP 10817772U JP S5143719 Y2 JPS5143719 Y2 JP S5143719Y2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP10817772U
Other languages
Japanese (ja)
Other versions
JPS4963845U (en:Method
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP10817772U priority Critical patent/JPS5143719Y2/ja
Publication of JPS4963845U publication Critical patent/JPS4963845U/ja
Application granted granted Critical
Publication of JPS5143719Y2 publication Critical patent/JPS5143719Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Chemical Vapour Deposition (AREA)
JP10817772U 1972-09-18 1972-09-18 Expired JPS5143719Y2 (en:Method)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10817772U JPS5143719Y2 (en:Method) 1972-09-18 1972-09-18

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10817772U JPS5143719Y2 (en:Method) 1972-09-18 1972-09-18

Publications (2)

Publication Number Publication Date
JPS4963845U JPS4963845U (en:Method) 1974-06-04
JPS5143719Y2 true JPS5143719Y2 (en:Method) 1976-10-23

Family

ID=28327335

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10817772U Expired JPS5143719Y2 (en:Method) 1972-09-18 1972-09-18

Country Status (1)

Country Link
JP (1) JPS5143719Y2 (en:Method)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5947516B2 (ja) * 2011-10-19 2016-07-06 信越化学工業株式会社 熱処理用ボート

Also Published As

Publication number Publication date
JPS4963845U (en:Method) 1974-06-04

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