JPS5143719Y2 - - Google Patents

Info

Publication number
JPS5143719Y2
JPS5143719Y2 JP10817772U JP10817772U JPS5143719Y2 JP S5143719 Y2 JPS5143719 Y2 JP S5143719Y2 JP 10817772 U JP10817772 U JP 10817772U JP 10817772 U JP10817772 U JP 10817772U JP S5143719 Y2 JPS5143719 Y2 JP S5143719Y2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP10817772U
Other languages
Japanese (ja)
Other versions
JPS4963845U (OSRAM
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP10817772U priority Critical patent/JPS5143719Y2/ja
Publication of JPS4963845U publication Critical patent/JPS4963845U/ja
Application granted granted Critical
Publication of JPS5143719Y2 publication Critical patent/JPS5143719Y2/ja
Expired legal-status Critical Current

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Landscapes

  • Chemical Vapour Deposition (AREA)
JP10817772U 1972-09-18 1972-09-18 Expired JPS5143719Y2 (OSRAM)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10817772U JPS5143719Y2 (OSRAM) 1972-09-18 1972-09-18

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10817772U JPS5143719Y2 (OSRAM) 1972-09-18 1972-09-18

Publications (2)

Publication Number Publication Date
JPS4963845U JPS4963845U (OSRAM) 1974-06-04
JPS5143719Y2 true JPS5143719Y2 (OSRAM) 1976-10-23

Family

ID=28327335

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10817772U Expired JPS5143719Y2 (OSRAM) 1972-09-18 1972-09-18

Country Status (1)

Country Link
JP (1) JPS5143719Y2 (OSRAM)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5947516B2 (ja) * 2011-10-19 2016-07-06 信越化学工業株式会社 熱処理用ボート

Also Published As

Publication number Publication date
JPS4963845U (OSRAM) 1974-06-04

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