JPS5143707B2 - - Google Patents
Info
- Publication number
- JPS5143707B2 JPS5143707B2 JP49102286A JP10228674A JPS5143707B2 JP S5143707 B2 JPS5143707 B2 JP S5143707B2 JP 49102286 A JP49102286 A JP 49102286A JP 10228674 A JP10228674 A JP 10228674A JP S5143707 B2 JPS5143707 B2 JP S5143707B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Treating Waste Gases (AREA)
- Removal Of Specific Substances (AREA)
- Furnace Charging Or Discharging (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP49102286A JPS5130166A (en) | 1974-09-04 | 1974-09-04 | So2*hf ofukumuhaigasuoshitsushikijokyoshitahaisuinoshorihoho |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP49102286A JPS5130166A (en) | 1974-09-04 | 1974-09-04 | So2*hf ofukumuhaigasuoshitsushikijokyoshitahaisuinoshorihoho |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5130166A JPS5130166A (en) | 1976-03-15 |
| JPS5143707B2 true JPS5143707B2 (ja) | 1976-11-24 |
Family
ID=14323354
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP49102286A Granted JPS5130166A (en) | 1974-09-04 | 1974-09-04 | So2*hf ofukumuhaigasuoshitsushikijokyoshitahaisuinoshorihoho |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5130166A (ja) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH05202751A (ja) * | 1991-10-24 | 1993-08-10 | Theo Goepel | 自己着火式往復内燃機関 |
| JPH06346765A (ja) * | 1993-06-08 | 1994-12-20 | Minoru Nakagawa | ガス．ハイブリッド．ディーゼルエンジン |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5399051B2 (ja) * | 2008-11-19 | 2014-01-29 | 森田化学工業株式会社 | フロン破壊ガス、または、ドライエッチング排ガス中の塩素およびフッ素の選択的固定化と回収物のリサイクル |
| JP6082339B2 (ja) * | 2013-11-21 | 2017-02-15 | 信越化学工業株式会社 | エッチング反応ガスの除害方法およびスクラバ装置 |
-
1974
- 1974-09-04 JP JP49102286A patent/JPS5130166A/ja active Granted
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH05202751A (ja) * | 1991-10-24 | 1993-08-10 | Theo Goepel | 自己着火式往復内燃機関 |
| JPH06346765A (ja) * | 1993-06-08 | 1994-12-20 | Minoru Nakagawa | ガス．ハイブリッド．ディーゼルエンジン |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5130166A (en) | 1976-03-15 |