JPS5143079A - Taishokuseijushimakujokyoho - Google Patents
TaishokuseijushimakujokyohoInfo
- Publication number
- JPS5143079A JPS5143079A JP11606974A JP11606974A JPS5143079A JP S5143079 A JPS5143079 A JP S5143079A JP 11606974 A JP11606974 A JP 11606974A JP 11606974 A JP11606974 A JP 11606974A JP S5143079 A JPS5143079 A JP S5143079A
- Authority
- JP
- Japan
- Prior art keywords
- taishokuseijushimakujokyoho
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- ing And Chemical Polishing (AREA)
- Manufacturing Of Printed Circuit Boards (AREA)
- Drying Of Semiconductors (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP11606974A JPS5143079A (ja) | 1974-10-11 | 1974-10-11 | Taishokuseijushimakujokyoho |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP11606974A JPS5143079A (ja) | 1974-10-11 | 1974-10-11 | Taishokuseijushimakujokyoho |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5143079A true JPS5143079A (ja) | 1976-04-13 |
Family
ID=14677929
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP11606974A Pending JPS5143079A (ja) | 1974-10-11 | 1974-10-11 | Taishokuseijushimakujokyoho |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5143079A (ja) |
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS60240128A (ja) * | 1984-05-15 | 1985-11-29 | Hitachi Ltd | 電磁波照射型洗浄方法 |
JPS61123143A (ja) * | 1984-11-19 | 1986-06-11 | Fujitsu Ltd | レジスト灰化方法 |
JPS61284925A (ja) * | 1985-06-10 | 1986-12-15 | Sony Corp | 半導体装置の製造方法 |
JPS6399529A (ja) * | 1986-10-16 | 1988-04-30 | Chlorine Eng Corp Ltd | 有機物被膜の除去方法 |
WO2002047142A1 (fr) * | 2000-12-05 | 2002-06-13 | Tokyo Electron Limited | Procede et appareil de traitement d'un article a traiter |
-
1974
- 1974-10-11 JP JP11606974A patent/JPS5143079A/ja active Pending
Non-Patent Citations (1)
Title |
---|
IBM TECHNICAL DISCLOSURE BULLETIN#V10#N8#M1=1968 * |
Cited By (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS60240128A (ja) * | 1984-05-15 | 1985-11-29 | Hitachi Ltd | 電磁波照射型洗浄方法 |
JPH0463538B2 (ja) * | 1984-05-15 | 1992-10-12 | Hitachi Ltd | |
JPS61123143A (ja) * | 1984-11-19 | 1986-06-11 | Fujitsu Ltd | レジスト灰化方法 |
JPS61284925A (ja) * | 1985-06-10 | 1986-12-15 | Sony Corp | 半導体装置の製造方法 |
JPS6399529A (ja) * | 1986-10-16 | 1988-04-30 | Chlorine Eng Corp Ltd | 有機物被膜の除去方法 |
WO2002047142A1 (fr) * | 2000-12-05 | 2002-06-13 | Tokyo Electron Limited | Procede et appareil de traitement d'un article a traiter |
EP1351283A1 (en) * | 2000-12-05 | 2003-10-08 | Tokyo Electron Limited | Method and apparatus for treating article to be treated |
EP1351283A4 (en) * | 2000-12-05 | 2006-01-25 | Tokyo Electron Ltd | METHOD AND DEVICE FOR TREATING AN ARTICLE TO BE TREATED |
US7208428B2 (en) | 2000-12-05 | 2007-04-24 | Tokyo Electron Limited | Method and apparatus for treating article to be treated |
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