JPS5142317A - - Google Patents
Info
- Publication number
- JPS5142317A JPS5142317A JP49115759A JP11575974A JPS5142317A JP S5142317 A JPS5142317 A JP S5142317A JP 49115759 A JP49115759 A JP 49115759A JP 11575974 A JP11575974 A JP 11575974A JP S5142317 A JPS5142317 A JP S5142317A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11575974A JPS5612668B2 (en) | 1974-10-08 | 1974-10-08 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11575974A JPS5612668B2 (en) | 1974-10-08 | 1974-10-08 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5142317A true JPS5142317A (en) | 1976-04-09 |
| JPS5612668B2 JPS5612668B2 (en) | 1981-03-24 |
Family
ID=14670331
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11575974A Expired JPS5612668B2 (en) | 1974-10-08 | 1974-10-08 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5612668B2 (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH02177509A (en) * | 1988-12-28 | 1990-07-10 | Matsushita Electric Ind Co Ltd | Etching of ruthenium oxide thin film |
-
1974
- 1974-10-08 JP JP11575974A patent/JPS5612668B2/ja not_active Expired
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH02177509A (en) * | 1988-12-28 | 1990-07-10 | Matsushita Electric Ind Co Ltd | Etching of ruthenium oxide thin film |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5612668B2 (en) | 1981-03-24 |