JPS5141547B2 - - Google Patents

Info

Publication number
JPS5141547B2
JPS5141547B2 JP3590773A JP3590773A JPS5141547B2 JP S5141547 B2 JPS5141547 B2 JP S5141547B2 JP 3590773 A JP3590773 A JP 3590773A JP 3590773 A JP3590773 A JP 3590773A JP S5141547 B2 JPS5141547 B2 JP S5141547B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP3590773A
Other languages
Japanese (ja)
Other versions
JPS4922861A (https=
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US247639A external-priority patent/US3915784A/en
Application filed filed Critical
Publication of JPS4922861A publication Critical patent/JPS4922861A/ja
Publication of JPS5141547B2 publication Critical patent/JPS5141547B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Perforating, Stamping-Out Or Severing By Means Other Than Cutting (AREA)
  • Dicing (AREA)
JP3590773A 1972-04-26 1973-03-30 Expired JPS5141547B2 (https=)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US24753072A 1972-04-26 1972-04-26
US247639A US3915784A (en) 1972-04-26 1972-04-26 Method of semiconductor chip separation

Publications (2)

Publication Number Publication Date
JPS4922861A JPS4922861A (https=) 1974-02-28
JPS5141547B2 true JPS5141547B2 (https=) 1976-11-10

Family

ID=26938738

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3590773A Expired JPS5141547B2 (https=) 1972-04-26 1973-03-30

Country Status (1)

Country Link
JP (1) JPS5141547B2 (https=)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55155272U (https=) * 1979-04-24 1980-11-08
JPS55162263U (https=) * 1979-05-07 1980-11-21

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60213044A (ja) * 1984-04-06 1985-10-25 Nec Kansai Ltd 半導体装置の製造方法

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55155272U (https=) * 1979-04-24 1980-11-08
JPS55162263U (https=) * 1979-05-07 1980-11-21

Also Published As

Publication number Publication date
JPS4922861A (https=) 1974-02-28

Similar Documents

Publication Publication Date Title
JPS5012951A (https=)
JPS5141547B2 (https=)
JPS4725631U (https=)
CS156320B1 (https=)
CH561697A5 (https=)
BG21593A3 (https=)
BG18261A1 (https=)
BG18326A1 (https=)
BG18343A1 (https=)
BG18404A1 (https=)
BG18459A1 (https=)
BG18484A1 (https=)
BG18503A1 (https=)
BG18508A1 (https=)
BG18743A1 (https=)
BG19234A1 (https=)
BG19419A1 (https=)
CH567378A5 (https=)
BG19862A1 (https=)
CH566913A5 (https=)
CH1116873A4 (https=)
CH1773873A4 (https=)
CH1798272A4 (https=)
CH585416A5 (https=)
CH562045A5 (https=)