JPS5141547B2 - - Google Patents
Info
- Publication number
- JPS5141547B2 JPS5141547B2 JP3590773A JP3590773A JPS5141547B2 JP S5141547 B2 JPS5141547 B2 JP S5141547B2 JP 3590773 A JP3590773 A JP 3590773A JP 3590773 A JP3590773 A JP 3590773A JP S5141547 B2 JPS5141547 B2 JP S5141547B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Perforating, Stamping-Out Or Severing By Means Other Than Cutting (AREA)
- Dicing (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US24753072A | 1972-04-26 | 1972-04-26 | |
| US247639A US3915784A (en) | 1972-04-26 | 1972-04-26 | Method of semiconductor chip separation |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS4922861A JPS4922861A (enExample) | 1974-02-28 |
| JPS5141547B2 true JPS5141547B2 (enExample) | 1976-11-10 |
Family
ID=26938738
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3590773A Expired JPS5141547B2 (enExample) | 1972-04-26 | 1973-03-30 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5141547B2 (enExample) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS55155272U (enExample) * | 1979-04-24 | 1980-11-08 | ||
| JPS55162263U (enExample) * | 1979-05-07 | 1980-11-21 |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60213044A (ja) * | 1984-04-06 | 1985-10-25 | Nec Kansai Ltd | 半導体装置の製造方法 |
-
1973
- 1973-03-30 JP JP3590773A patent/JPS5141547B2/ja not_active Expired
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS55155272U (enExample) * | 1979-04-24 | 1980-11-08 | ||
| JPS55162263U (enExample) * | 1979-05-07 | 1980-11-21 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS4922861A (enExample) | 1974-02-28 |