JPS5141547B2 - - Google Patents

Info

Publication number
JPS5141547B2
JPS5141547B2 JP3590773A JP3590773A JPS5141547B2 JP S5141547 B2 JPS5141547 B2 JP S5141547B2 JP 3590773 A JP3590773 A JP 3590773A JP 3590773 A JP3590773 A JP 3590773A JP S5141547 B2 JPS5141547 B2 JP S5141547B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP3590773A
Other languages
Japanese (ja)
Other versions
JPS4922861A (el
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US247639A external-priority patent/US3915784A/en
Application filed filed Critical
Publication of JPS4922861A publication Critical patent/JPS4922861A/ja
Publication of JPS5141547B2 publication Critical patent/JPS5141547B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Perforating, Stamping-Out Or Severing By Means Other Than Cutting (AREA)
  • Dicing (AREA)
JP3590773A 1972-04-26 1973-03-30 Expired JPS5141547B2 (el)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US24753072A 1972-04-26 1972-04-26
US247639A US3915784A (en) 1972-04-26 1972-04-26 Method of semiconductor chip separation

Publications (2)

Publication Number Publication Date
JPS4922861A JPS4922861A (el) 1974-02-28
JPS5141547B2 true JPS5141547B2 (el) 1976-11-10

Family

ID=26938738

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3590773A Expired JPS5141547B2 (el) 1972-04-26 1973-03-30

Country Status (1)

Country Link
JP (1) JPS5141547B2 (el)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55155272U (el) * 1979-04-24 1980-11-08
JPS55162263U (el) * 1979-05-07 1980-11-21

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60213044A (ja) * 1984-04-06 1985-10-25 Nec Kansai Ltd 半導体装置の製造方法

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55155272U (el) * 1979-04-24 1980-11-08
JPS55162263U (el) * 1979-05-07 1980-11-21

Also Published As

Publication number Publication date
JPS4922861A (el) 1974-02-28

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