JPS5141199B2 - - Google Patents

Info

Publication number
JPS5141199B2
JPS5141199B2 JP13462373A JP13462373A JPS5141199B2 JP S5141199 B2 JPS5141199 B2 JP S5141199B2 JP 13462373 A JP13462373 A JP 13462373A JP 13462373 A JP13462373 A JP 13462373A JP S5141199 B2 JPS5141199 B2 JP S5141199B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP13462373A
Other languages
Japanese (ja)
Other versions
JPS5083697A (da
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP13462373A priority Critical patent/JPS5141199B2/ja
Publication of JPS5083697A publication Critical patent/JPS5083697A/ja
Publication of JPS5141199B2 publication Critical patent/JPS5141199B2/ja
Expired legal-status Critical Current

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Landscapes

  • Particle Accelerators (AREA)
JP13462373A 1973-11-29 1973-11-29 Expired JPS5141199B2 (da)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13462373A JPS5141199B2 (da) 1973-11-29 1973-11-29

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13462373A JPS5141199B2 (da) 1973-11-29 1973-11-29

Publications (2)

Publication Number Publication Date
JPS5083697A JPS5083697A (da) 1975-07-07
JPS5141199B2 true JPS5141199B2 (da) 1976-11-08

Family

ID=15132694

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13462373A Expired JPS5141199B2 (da) 1973-11-29 1973-11-29

Country Status (1)

Country Link
JP (1) JPS5141199B2 (da)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02114469U (da) * 1989-03-03 1990-09-13

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5810160Y2 (ja) * 1976-08-31 1983-02-24 三菱電機株式会社 電子線照射装置
JP6339821B2 (ja) * 2014-02-20 2018-06-06 浜松ホトニクス株式会社 電子線照射装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02114469U (da) * 1989-03-03 1990-09-13

Also Published As

Publication number Publication date
JPS5083697A (da) 1975-07-07

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