JPS5139811A - Norikagokurumanado no futenseigyosochi - Google Patents

Norikagokurumanado no futenseigyosochi

Info

Publication number
JPS5139811A
JPS5139811A JP11320574A JP11320574A JPS5139811A JP S5139811 A JPS5139811 A JP S5139811A JP 11320574 A JP11320574 A JP 11320574A JP 11320574 A JP11320574 A JP 11320574A JP S5139811 A JPS5139811 A JP S5139811A
Authority
JP
Japan
Prior art keywords
norikagokurumanado
futenseigyosochi
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP11320574A
Other languages
Japanese (ja)
Other versions
JPS5328685B2 (en
Inventor
Shigemitsu Sato
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Senyo Kiko Co Ltd
Original Assignee
Senyo Kiko Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Senyo Kiko Co Ltd filed Critical Senyo Kiko Co Ltd
Priority to JP11320574A priority Critical patent/JPS5139811A/en
Publication of JPS5139811A publication Critical patent/JPS5139811A/en
Publication of JPS5328685B2 publication Critical patent/JPS5328685B2/ja
Granted legal-status Critical Current

Links

JP11320574A 1974-09-30 1974-09-30 Norikagokurumanado no futenseigyosochi Granted JPS5139811A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11320574A JPS5139811A (en) 1974-09-30 1974-09-30 Norikagokurumanado no futenseigyosochi

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11320574A JPS5139811A (en) 1974-09-30 1974-09-30 Norikagokurumanado no futenseigyosochi

Publications (2)

Publication Number Publication Date
JPS5139811A true JPS5139811A (en) 1976-04-03
JPS5328685B2 JPS5328685B2 (en) 1978-08-16

Family

ID=14606207

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11320574A Granted JPS5139811A (en) 1974-09-30 1974-09-30 Norikagokurumanado no futenseigyosochi

Country Status (1)

Country Link
JP (1) JPS5139811A (en)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN108293291B (en) 2016-01-18 2020-09-18 东芝三菱电机产业系统株式会社 Active gas generating apparatus and film forming apparatus
WO2017203674A1 (en) 2016-05-27 2017-11-30 東芝三菱電機産業システム株式会社 Active gas generation device
WO2018104988A1 (en) 2016-12-05 2018-06-14 東芝三菱電機産業システム株式会社 Active gas generation device
WO2019138456A1 (en) 2018-01-10 2019-07-18 東芝三菱電機産業システム株式会社 Active gas generation device
CN112334599B (en) 2018-06-25 2023-09-29 东芝三菱电机产业系统株式会社 Reactive gas generator and film forming apparatus
US11129267B2 (en) 2019-02-13 2021-09-21 Toshiba Mitsubishi-Electric Industrial Systems Corporation Active gas generation apparatus

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4914231U (en) * 1972-05-10 1974-02-06

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4914231U (en) * 1972-05-10 1974-02-06

Also Published As

Publication number Publication date
JPS5328685B2 (en) 1978-08-16

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