JPS5139811A - Norikagokurumanado no futenseigyosochi - Google Patents
Norikagokurumanado no futenseigyosochiInfo
- Publication number
- JPS5139811A JPS5139811A JP11320574A JP11320574A JPS5139811A JP S5139811 A JPS5139811 A JP S5139811A JP 11320574 A JP11320574 A JP 11320574A JP 11320574 A JP11320574 A JP 11320574A JP S5139811 A JPS5139811 A JP S5139811A
- Authority
- JP
- Japan
- Prior art keywords
- norikagokurumanado
- futenseigyosochi
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP11320574A JPS5139811A (en) | 1974-09-30 | 1974-09-30 | Norikagokurumanado no futenseigyosochi |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP11320574A JPS5139811A (en) | 1974-09-30 | 1974-09-30 | Norikagokurumanado no futenseigyosochi |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5139811A true JPS5139811A (en) | 1976-04-03 |
JPS5328685B2 JPS5328685B2 (en) | 1978-08-16 |
Family
ID=14606207
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP11320574A Granted JPS5139811A (en) | 1974-09-30 | 1974-09-30 | Norikagokurumanado no futenseigyosochi |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5139811A (en) |
Families Citing this family (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN108293291B (en) | 2016-01-18 | 2020-09-18 | 东芝三菱电机产业系统株式会社 | Active gas generating apparatus and film forming apparatus |
WO2017203674A1 (en) | 2016-05-27 | 2017-11-30 | 東芝三菱電機産業システム株式会社 | Active gas generation device |
WO2018104988A1 (en) | 2016-12-05 | 2018-06-14 | 東芝三菱電機産業システム株式会社 | Active gas generation device |
WO2019138456A1 (en) | 2018-01-10 | 2019-07-18 | 東芝三菱電機産業システム株式会社 | Active gas generation device |
CN112334599B (en) | 2018-06-25 | 2023-09-29 | 东芝三菱电机产业系统株式会社 | Reactive gas generator and film forming apparatus |
US11129267B2 (en) | 2019-02-13 | 2021-09-21 | Toshiba Mitsubishi-Electric Industrial Systems Corporation | Active gas generation apparatus |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4914231U (en) * | 1972-05-10 | 1974-02-06 |
-
1974
- 1974-09-30 JP JP11320574A patent/JPS5139811A/en active Granted
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4914231U (en) * | 1972-05-10 | 1974-02-06 |
Also Published As
Publication number | Publication date |
---|---|
JPS5328685B2 (en) | 1978-08-16 |
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