JPS5139497A - - Google Patents
Info
- Publication number
- JPS5139497A JPS5139497A JP49111475A JP11147574A JPS5139497A JP S5139497 A JPS5139497 A JP S5139497A JP 49111475 A JP49111475 A JP 49111475A JP 11147574 A JP11147574 A JP 11147574A JP S5139497 A JPS5139497 A JP S5139497A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
- Mechanical Treatment Of Semiconductor (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP49111475A JPS5834254B2 (ja) | 1974-09-30 | 1974-09-30 | ケンマソウチ |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP49111475A JPS5834254B2 (ja) | 1974-09-30 | 1974-09-30 | ケンマソウチ |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5139497A true JPS5139497A (ja) | 1976-04-02 |
| JPS5834254B2 JPS5834254B2 (ja) | 1983-07-26 |
Family
ID=14562183
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP49111475A Expired JPS5834254B2 (ja) | 1974-09-30 | 1974-09-30 | ケンマソウチ |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5834254B2 (ja) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5320194A (en) * | 1976-08-06 | 1978-02-24 | Nec Corp | Method for polishing both surfaces undistortedly |
| JPH05185356A (ja) * | 1992-08-03 | 1993-07-27 | Hitachi Ltd | 研磨装置 |
| US5384986A (en) * | 1992-09-24 | 1995-01-31 | Ebara Corporation | Polishing apparatus |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4814689U (ja) * | 1971-06-25 | 1973-02-19 |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4814689B1 (ja) * | 1964-09-16 | 1973-05-09 |
-
1974
- 1974-09-30 JP JP49111475A patent/JPS5834254B2/ja not_active Expired
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4814689U (ja) * | 1971-06-25 | 1973-02-19 |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5320194A (en) * | 1976-08-06 | 1978-02-24 | Nec Corp | Method for polishing both surfaces undistortedly |
| JPH05185356A (ja) * | 1992-08-03 | 1993-07-27 | Hitachi Ltd | 研磨装置 |
| JPH0811355B2 (ja) * | 1992-08-03 | 1996-02-07 | 株式会社日立製作所 | 研磨装置 |
| US5384986A (en) * | 1992-09-24 | 1995-01-31 | Ebara Corporation | Polishing apparatus |
| USRE38228E1 (en) * | 1992-09-24 | 2003-08-19 | Ebara Corporation | Polishing apparatus |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5834254B2 (ja) | 1983-07-26 |