JPS5138577B2 - - Google Patents

Info

Publication number
JPS5138577B2
JPS5138577B2 JP47107999A JP10799972A JPS5138577B2 JP S5138577 B2 JPS5138577 B2 JP S5138577B2 JP 47107999 A JP47107999 A JP 47107999A JP 10799972 A JP10799972 A JP 10799972A JP S5138577 B2 JPS5138577 B2 JP S5138577B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP47107999A
Other languages
Japanese (ja)
Other versions
JPS4966060A (en:Method
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP47107999A priority Critical patent/JPS5138577B2/ja
Publication of JPS4966060A publication Critical patent/JPS4966060A/ja
Publication of JPS5138577B2 publication Critical patent/JPS5138577B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Analysing Materials By The Use Of Radiation (AREA)
JP47107999A 1972-10-30 1972-10-30 Expired JPS5138577B2 (en:Method)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP47107999A JPS5138577B2 (en:Method) 1972-10-30 1972-10-30

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP47107999A JPS5138577B2 (en:Method) 1972-10-30 1972-10-30

Publications (2)

Publication Number Publication Date
JPS4966060A JPS4966060A (en:Method) 1974-06-26
JPS5138577B2 true JPS5138577B2 (en:Method) 1976-10-22

Family

ID=14473405

Family Applications (1)

Application Number Title Priority Date Filing Date
JP47107999A Expired JPS5138577B2 (en:Method) 1972-10-30 1972-10-30

Country Status (1)

Country Link
JP (1) JPS5138577B2 (en:Method)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5221764A (en) * 1975-08-13 1977-02-18 Hitachi Ltd Scattering electron checking diaphragm
JPS5812979B2 (ja) * 1976-04-23 1983-03-11 日本電信電話株式会社 荷電ビ−ム径制御装置

Also Published As

Publication number Publication date
JPS4966060A (en:Method) 1974-06-26

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