JPS5138460B2 - - Google Patents
Info
- Publication number
- JPS5138460B2 JPS5138460B2 JP47058387A JP5838772A JPS5138460B2 JP S5138460 B2 JPS5138460 B2 JP S5138460B2 JP 47058387 A JP47058387 A JP 47058387A JP 5838772 A JP5838772 A JP 5838772A JP S5138460 B2 JPS5138460 B2 JP S5138460B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Sorption Type Refrigeration Machines (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP47058387A JPS5138460B2 (https=) | 1972-06-12 | 1972-06-12 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP47058387A JPS5138460B2 (https=) | 1972-06-12 | 1972-06-12 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS4917543A JPS4917543A (https=) | 1974-02-16 |
| JPS5138460B2 true JPS5138460B2 (https=) | 1976-10-21 |
Family
ID=13082915
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP47058387A Expired JPS5138460B2 (https=) | 1972-06-12 | 1972-06-12 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5138460B2 (https=) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5664342A (en) * | 1979-10-29 | 1981-06-01 | Ulvac Corp | Photomask original plate having protective film on reverse side |
-
1972
- 1972-06-12 JP JP47058387A patent/JPS5138460B2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS4917543A (https=) | 1974-02-16 |