JPS5138215B2 - - Google Patents
Info
- Publication number
- JPS5138215B2 JPS5138215B2 JP47092762A JP9276272A JPS5138215B2 JP S5138215 B2 JPS5138215 B2 JP S5138215B2 JP 47092762 A JP47092762 A JP 47092762A JP 9276272 A JP9276272 A JP 9276272A JP S5138215 B2 JPS5138215 B2 JP S5138215B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R33/00—Arrangements or instruments for measuring magnetic variables
- G01R33/02—Measuring direction or magnitude of magnetic fields or magnetic flux
- G01R33/025—Compensating stray fields
-
- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05F—SYSTEMS FOR REGULATING ELECTRIC OR MAGNETIC VARIABLES
- G05F7/00—Regulating magnetic variables
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
- H01J37/09—Diaphragms; Shields associated with electron or ion-optical arrangements; Compensation of disturbing fields
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/24—Circuit arrangements not adapted to a particular application of the tube and not otherwise provided for
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K9/00—Screening of apparatus or components against electric or magnetic fields
- H05K9/0064—Earth or grounding circuit
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- General Physics & Mathematics (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Electromagnetism (AREA)
- Radar, Positioning & Navigation (AREA)
- Automation & Control Theory (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Measuring Magnetic Variables (AREA)
- Electron Sources, Ion Sources (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE19712146071 DE2146071C3 (de) | 1971-09-15 | Anordnung zum Erzielen eines von magnetischen Störfeldern freien Raumes |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS4838972A JPS4838972A (en, 2012) | 1973-06-08 |
| JPS5138215B2 true JPS5138215B2 (en, 2012) | 1976-10-20 |
Family
ID=5819613
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP47092762A Expired JPS5138215B2 (en, 2012) | 1971-09-15 | 1972-09-14 |
Country Status (2)
| Country | Link |
|---|---|
| JP (1) | JPS5138215B2 (en, 2012) |
| NL (1) | NL7206464A (en, 2012) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0482815U (en, 2012) * | 1990-11-28 | 1992-07-20 |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS53112469U (en, 2012) * | 1977-02-15 | 1978-09-07 | ||
| JPS5729158A (en) * | 1980-07-30 | 1982-02-17 | Hitachi Ltd | Retrying system for program |
| JP2650574B2 (ja) * | 1992-07-10 | 1997-09-03 | 株式会社島津製作所 | 磁場型質量分析装置 |
| JP3406273B2 (ja) * | 2000-03-28 | 2003-05-12 | 株式会社エムティアイ | 外乱磁界キャンセル装置 |
-
1972
- 1972-05-12 NL NL7206464A patent/NL7206464A/xx unknown
- 1972-09-14 JP JP47092762A patent/JPS5138215B2/ja not_active Expired
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0482815U (en, 2012) * | 1990-11-28 | 1992-07-20 |
Also Published As
| Publication number | Publication date |
|---|---|
| NL7206464A (en, 2012) | 1973-03-19 |
| DE2146071B2 (de) | 1975-07-10 |
| DE2146071A1 (de) | 1973-03-22 |
| JPS4838972A (en, 2012) | 1973-06-08 |